HORIBA SEC-Z719MGX SUR11HGBFRKG/W/US-100-IPF SU8000 4022.436

Product Details

SEC-Z719MGX SUR11HGBFRKG/W/US-100-IPF SU8000 4022.436.4502 Product Description

The HORIBA SEC-Z719MGX is a precision digital mass flow controller engineered for seamless integration within the SEC-Z series control architecture. Designed to meet the exacting demands of semiconductor fabrication, chemical vapor deposition (CVD), atomic layer deposition (ALD), and advanced process gas management systems, this MFC delivers exceptional flow accuracy, rapid response, and long-term stability across multi-zone process chambers. Its architecture-native design ensures that every deployment contributes directly to system consistency, signal integrity, and modular scalability — making it a cornerstone component in both greenfield installations and legacy system upgrades.

At NANKMOS, every SEC-Z719MGX unit is sourced through verified supply channels, subjected to pre-shipment functional testing, and backed by a 12-Month Warranty covering manufacturing defects and operational performance. Our global logistics infrastructure ensures rapid fulfillment to semiconductor fabs, research institutions, and OEM integrators worldwide.

The SEC-Z719MGX does not operate in isolation — it is a precision node within a tightly coordinated automation architecture. In a fully realized SEC-Z gas delivery system, this MFC interfaces directly with the HORIBA SEC-Z700 series manifold block, which provides the mechanical and fluidic backbone for multi-channel gas stick configurations. The manifold's modular design allows engineers to expand or reconfigure gas lines without disrupting adjacent process zones, preserving system uptime during maintenance windows.

At the control layer, the SEC-Z719MGX communicates with the HORIBA D-NET digital network controller or equivalent SEC-Z platform host, enabling real-time flow data acquisition, setpoint adjustment, and closed-loop PID regulation across all installed MFC channels simultaneously. This digital backbone eliminates analog signal drift — a critical advantage in long-run process chambers where cumulative calibration error can compromise yield.

Power delivery to the SEC-Z719MGX is managed through the HORIBA SEC-Z rack power supply unit, which provides regulated ±15 VDC and +24 VDC rails with built-in overcurrent protection. In redundant architecture designs, a secondary PSU module can be hot-swapped without interrupting active process flows, supporting the high-availability requirements of 24/7 semiconductor production environments.

For process isolation and signal conditioning, the SEC-Z719MGX is frequently deployed alongside HORIBA SUR-series signal isolation modules and SEC-Z junction boxes, which buffer analog setpoint signals from upstream PLC outputs — typically a Siemens S7-300/S7-400 series CPU or an Allen-Bradley ControlLogix L7x controller — before they reach the MFC's internal control circuit. This isolation layer protects the MFC's sensitive flow sensor from ground loop interference and EMI generated by high-current actuator circuits in adjacent control cabinet zones.

At the HMI and supervisory layer, process engineers interact with the SEC-Z719MGX through HORIBA MFCS-F multi-channel flow control software or third-party SCADA platforms via OPC-UA gateway modules. Real-time flow trending, alarm management, and recipe-based setpoint sequencing are all accessible without requiring direct hardware intervention, reducing operator exposure to process gases and improving overall safety compliance.

In multi-zone CVD or ALD tool configurations, the SEC-Z719MGX is typically installed in arrays of 8 to 32 channels per gas panel, with each channel independently addressable via the D-NET protocol. Adjacent channels may include HORIBA SEC-Z series pressure controllers (SEC-Z500 / SEC-Z600) for upstream pressure regulation, ensuring that the MFC operates within its specified inlet pressure window at all times — a prerequisite for maintaining ±0.5% full-scale flow accuracy.

For system commissioning and long-term maintenance, the SEC-Z719MGX supports in-situ zero and span calibration via the digital interface, eliminating the need to remove the unit from the gas stick for routine verification. Calibration records can be logged automatically by the host controller, supporting the traceability requirements of ISO 9001 and semiconductor equipment qualification protocols (SEMI S2, SEMI E49).

Semiconductor Fabrication (CVD / ALD / Etch): The SEC-Z719MGX is purpose-built for front-end-of-line (FEOL) and back-end-of-line (BEOL) process steps where precise gas stoichiometry directly determines film quality, etch selectivity, and device yield. Multi-channel SEC-Z gas panels equipped with this MFC are deployed in PECVD, LPCVD, thermal ALD, and plasma etch chambers across 200mm and 300mm wafer fabs.

Photovoltaic and Flat Panel Display Manufacturing: Large-area deposition tools for thin-film solar cells and OLED display substrates require high-flow-range MFCs with exceptional repeatability across extended production campaigns. The SEC-Z719MGX's digital control architecture ensures consistent gas delivery across substrate generations without manual recalibration between batches.

Chemical and Petrochemical Process Control: In pilot plant and specialty chemical synthesis environments, the SEC-Z719MGX provides accurate metering of reactive and corrosive process gases — including silane, ammonia, hydrogen chloride, and fluorine-based compounds — within fully enclosed gas cabinet systems that meet ATEX and IECEx safety standards.

Research and Advanced Materials Laboratories: University and national laboratory thin-film deposition systems, including MBE, sputtering, and ALD research tools, rely on the SEC-Z series for its combination of high accuracy, digital configurability, and compatibility with a wide range of specialty gas chemistries. The 12-Month Warranty and NANKMOS in-stock availability reduce procurement lead times for time-sensitive research programs.

Power Electronics and LED Manufacturing: MOCVD reactors used in compound semiconductor (GaN, SiC, InP) and LED epitaxy production require MFCs with sub-1% accuracy and fast transient response to support abrupt interface growth. The SEC-Z719MGX's closed-loop digital control meets these requirements while integrating natively with existing SEC-Z platform infrastructure.

Q1: Is the SEC-Z719MGX directly compatible with existing SEC-Z series gas stick manifolds and D-NET network controllers without additional interface hardware? Yes. The SEC-Z719MGX is designed as a native component of the HORIBA SEC-Z platform. It uses the same manifold block port geometry (IPF configuration), the same ±15 VDC / +24 VDC power rail specification, and the same D-NET digital communication protocol as all other SEC-Z series MFCs and pressure controllers. No signal converters, adapter plates, or protocol bridges are required for integration into an existing SEC-Z gas panel. Engineers should verify the specific flow range and gas calibration of the SUR11HGBFRKG/W/US-100-IPF configuration against their process requirements prior to installation.

Q2: What long-term maintenance procedures are recommended to sustain SEC-Z719MGX flow accuracy over multi-year production campaigns, and does the 12-Month Warranty cover calibration drift? HORIBA recommends periodic in-situ zero and span verification at intervals defined by the process qualification protocol — typically every 6 to 12 months for high-utilization production tools. The SEC-Z719MGX supports this procedure via its digital interface without requiring removal from the gas stick, minimizing system downtime. The 12-Month Warranty provided by NANKMOS covers manufacturing defects and confirmed operational failures under normal operating conditions. Calibration drift resulting from process gas contamination, overpressure events, or operation outside specified environmental limits is addressed through NANKMOS's post-warranty repair and recalibration service program.

Q3: Can NANKMOS supply multiple SEC-Z719MGX units for a full gas panel build-out, and what is the typical lead time for volume orders? NANKMOS maintains verified inventory of SEC-Z series MFCs including the SEC-Z719MGX configuration. Standard in-stock units are available for immediate shipment following order confirmation and pre-shipment functional testing. Volume orders for full gas panel configurations — typically 8 to 32 MFC channels — are accommodated through our industrial supply program, with lead times and pricing confirmed at the time of inquiry. All units shipped under volume orders carry the same 12-Month Warranty and are accompanied by test reports generated during pre-shipment verification. Contact [email protected] or +86 18359268345 for volume pricing and availability confirmation.